Problem tylanpoly SNF 2009-10-07 13:21:20: end of AMOR585 boat does not auto come out

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Wed Oct 7 13:21:20 PDT 2009


At the end of process AMOR585, the boat does not automatically come out.  Have to manually pull boat out in step 125.  When the alarm ack button is pushed 2x, the boat automatically goes back in as it always has after unloading wafers.  This has happened on my last run as well. 




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