Comment tylanpoly SNF 2009-10-28 17:51:07: Qual after Pull&Clean

latta at snf.stanford.edu latta at snf.stanford.edu
Wed Oct 28 17:51:08 PDT 2009


POLYEMIT  00:15:00   50 wafer spread
  (expect about 2000A)
Front = 1904A, Std Dev = 15
Front Center = 1939A, Std Dev = 16
Back Center = 1976A, Std Dev = 14
Back = 1991A, Std Dev = 21
Average All = 1953A
Dep rate = 130A/min




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