Problem tylanpoly SNF 2010-08-23 11:06:20: no silane flow during step 70 of amor585

seymour at snf.stanford.edu seymour at snf.stanford.edu
Mon Aug 23 11:50:06 PDT 2010


tube alarming for silane leak and unable to reset alarm. 
Aborted run and alarm reset. Problem due to both side doors open during BPSG pump install. 




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