From tberg at snf.stanford.edu  Mon Dec 13 06:42:28 2010
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 13 Dec 2010 06:42:28 -0800
Subject: Shutdown tylanpoly SNF 2010-12-13 06:42:28: Scheduled pull and clean
Message-ID: <mailman.1072.1356283798.5060.tylanpoly-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Mon Dec 13 14:19:25 2010
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mon, 13 Dec 2010 14:19:25 -0800
Subject: Comment tylanpoly SNF 2010-12-13 14:19:24: tube back together
Message-ID: <mailman.1073.1356283798.5060.tylanpoly-pcs@snf.stanford.edu>

passed cold leak check. The element breaker is on and the tube is heating. I loaded polycoat for a coat cycle and will start it when process temp is reached. 
A test will be needed after the coat.



From tberg at snf.stanford.edu  Tue Dec 14 06:16:06 2010
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Tue, 14 Dec 2010 06:16:06 -0800
Subject: Comment tylanpoly SNF 2010-12-14 06:16:05: Running coat
Message-ID: <mailman.1074.1356283798.5060.tylanpoly-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Tue Dec 14 08:31:28 2010
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Tue, 14 Dec 2010 08:31:28 -0800
Subject: Comment tylanpoly SNF 2010-12-14 08:31:27: coat complete
Message-ID: <mailman.1075.1356283799.5060.tylanpoly-pcs@snf.stanford.edu>

needs testing



From seymour at snf.stanford.edu  Tue Dec 14 08:32:18 2010
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Tue, 14 Dec 2010 08:32:18 -0800
Subject: Shutdown tylanpoly SNF 2010-12-13 06:42:28: Scheduled pull and clean
Message-ID: <mailman.1076.1356283799.5060.tylanpoly-pcs@snf.stanford.edu>

clmpleted pull and clean needs testing



From seymour at snf.stanford.edu  Tue Dec 14 08:32:31 2010
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Tue, 14 Dec 2010 08:32:31 -0800
Subject: Problem tylanpoly SNF 2010-12-14 08:32:30: needs test
Message-ID: <mailman.1077.1356283799.5060.tylanpoly-pcs@snf.stanford.edu>




From maurice at snf.stanford.edu  Tue Dec 14 09:01:54 2010
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Tue, 14 Dec 2010 09:01:54 -0800
Subject: Shutdown tylanpoly SNF 2010-12-14 09:01:53: running test after pull/clean
Message-ID: <mailman.1078.1356283799.5060.tylanpoly-pcs@snf.stanford.edu>




From maurice at snf.stanford.edu  Tue Dec 14 11:01:00 2010
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Tue, 14 Dec 2010 11:01:00 -0800
Subject: Shutdown tylanpoly SNF 2010-12-14 09:01:53: running test after pull/clean
Message-ID: <mailman.1079.1356283799.5060.tylanpoly-pcs@snf.stanford.edu>

Test complete
Ran Polyemit  00:10:00
Expected ~1200
Actual  1148 center
ctblr  1148,1141,1145,1144,1148
Uniformity looks good across the wafer



From maurice at snf.stanford.edu  Tue Dec 14 11:01:07 2010
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Tue, 14 Dec 2010 11:01:07 -0800
Subject: Problem tylanpoly SNF 2010-12-14 08:32:30: needs test
Message-ID: <mailman.1080.1356283799.5060.tylanpoly-pcs@snf.stanford.edu>

Test complete
Ran Polyemit  00:10:00
Expected ~1200
Actual  1148 center



From maurice at snf.stanford.edu  Tue Dec 14 11:01:15 2010
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Tue, 14 Dec 2010 11:01:15 -0800
Subject: Comment tylanpoly SNF 2010-12-14 08:31:27: coat complete
Message-ID: <mailman.1081.1356283799.5060.tylanpoly-pcs@snf.stanford.edu>

logged