From seymour at snf.stanford.edu Thu Jun 10 08:31:01 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 10 Jun 2010 08:31:01 -0700 Subject: Comment tylanpoly SNF 2010-06-10 08:31:00: oil changed Message-ID: level glass changed From lindaw at snf.stanford.edu Fri Jun 11 11:28:14 2010 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 11 Jun 2010 11:28:14 -0700 Subject: Comment tylanpoly SNF 2010-06-11 11:28:13: MFS alarm at beginning of step 20 AMOR585 Message-ID: THe MFS alarm went off right at the beginning of step 20 of AMOR585. While the alarm was still going off, I checked the console with DI ST 9, and no alarm message showed. The status page looked normal. I pressed Alarm Ack, and the alarm stopped and the program continued to run. Another weird thing, when I went to manually check that the tube was vented before pressing run, the boat came out, but went back in by itself. When I pressed run, the boat did not come out automatically, I had to bring it out manually while the program was in step 005. After loading my wafers, and pressing Alarm Ack, the boat went back into the tube automatically as it usually does. From tberg at snf.stanford.edu Fri Jun 18 06:03:15 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 18 Jun 2010 06:03:15 -0700 Subject: Comment tylanpoly SNF 2010-05-14 08:26:09: oil changed Message-ID: noted From tberg at snf.stanford.edu Fri Jun 18 06:03:28 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 18 Jun 2010 06:03:28 -0700 Subject: Comment tylanpoly SNF 2010-05-28 07:53:44: oil changed Message-ID: noted From seymour at snf.stanford.edu Mon Jun 28 14:00:09 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 28 Jun 2010 14:00:09 -0700 Subject: Comment tylanpoly SNF 2010-06-28 14:00:08: oil changed Message-ID: level glass cleaned