From seymour at snf.stanford.edu  Fri Mar  5 08:24:38 2010
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 5 Mar 2010 08:24:38 -0800
Subject: Comment tylanpoly SNF 2010-03-05 08:24:38: changed oil
Message-ID: <mailman.1007.1356283798.5060.tylanpoly-pcs@snf.stanford.edu>

cleaned level glass



From seymour at snf.stanford.edu  Fri Mar 19 08:29:23 2010
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 19 Mar 2010 08:29:23 -0700
Subject: Comment tylanpoly SNF 2010-03-19 08:29:22: oil changed 
Message-ID: <mailman.1008.1356283798.5060.tylanpoly-pcs@snf.stanford.edu>

level glass cleaned



From ludwig at snf.stanford.edu  Fri Mar 26 17:32:50 2010
From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu)
Date: Fri, 26 Mar 2010 17:32:50 -0700
Subject: Problem tylanpoly SNF 2010-03-26 17:32:48: AMOR4006
Message-ID: <mailman.1009.1356283798.5060.tylanpoly-pcs@snf.stanford.edu>

Processed 50wafers, with AMOR4006 for 135min, the thickness should have been around 6k, is came out to 3k
Prev. results with the same process 45min =2k