Problem tylanpoly SNF 2010-03-26 17:32:48: AMOR4006

ludwig at snf.stanford.edu ludwig at snf.stanford.edu
Fri Mar 26 17:32:50 PDT 2010


Processed 50wafers, with AMOR4006 for 135min, the thickness should have been around 6k, is came out to 3k
Prev. results with the same process 45min =2k




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