From lindaw at snf.stanford.edu  Thu Aug 18 14:24:45 2011
From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu)
Date: Thu, 18 Aug 2011 14:24:45 -0700
Subject: Comment tylanpoly SNF 2011-08-18 14:24:44: the metal wand for the tylanbpsg looks mangled
Message-ID: <mailman.1138.1356283799.5060.tylanpoly-pcs@snf.stanford.edu>

Someone or something was not kind to the metal wand for the tylanbpsg.  It appears to be quite mangled.



From tberg at snf.stanford.edu  Fri Aug 19 06:33:17 2011
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Fri, 19 Aug 2011 06:33:17 -0700
Subject: Comment tylanpoly SNF 2011-08-18 14:24:44: the metal wand for the tylanbpsg looks mangled
Message-ID: <mailman.1139.1356283799.5060.tylanpoly-pcs@snf.stanford.edu>

Replaced bent vacuum wand



From cachang at snf.stanford.edu  Sun Aug 21 20:41:54 2011
From: cachang at snf.stanford.edu (cachang at snf.stanford.edu)
Date: Sun, 21 Aug 2011 20:41:54 -0700
Subject: Comment tylanpoly SNF 2011-08-21 20:41:54: MFS alarm
Message-ID: <mailman.1140.1356283799.5060.tylanpoly-pcs@snf.stanford.edu>

In the first step and last step of recipe AMOR525



From tberg at snf.stanford.edu  Mon Aug 29 13:25:13 2011
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 29 Aug 2011 13:25:13 -0700
Subject: Shutdown tylanpoly SNF 2011-08-29 13:25:13: SiH4 Sensor is bad
Message-ID: <mailman.1141.1356283799.5060.tylanpoly-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Tue Aug 30 08:09:50 2011
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Tue, 30 Aug 2011 08:09:50 -0700
Subject: Shutdown tylanpoly SNF 2011-08-29 13:25:13: SiH4 Sensor is bad
Message-ID: <mailman.1142.1356283799.5060.tylanpoly-pcs@snf.stanford.edu>

replaced silane sensor. checked all 4 gas flows. all flowed to setpoint. tube base pressure good. needs testing after repair



From seymour at snf.stanford.edu  Tue Aug 30 08:10:10 2011
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Tue, 30 Aug 2011 08:10:10 -0700
Subject: Problem tylanpoly SNF 2011-08-30 08:10:09: needs test after repair
Message-ID: <mailman.1143.1356283799.5060.tylanpoly-pcs@snf.stanford.edu>




From maurice at snf.stanford.edu  Tue Aug 30 15:43:25 2011
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Tue, 30 Aug 2011 15:43:25 -0700
Subject: Problem tylanpoly SNF 2011-08-30 08:10:09: needs test after repair
Message-ID: <mailman.1144.1356283799.5060.tylanpoly-pcs@snf.stanford.edu>

Ran Polyemit  00:12:00
expected ~1200ang
Actual  1575 and
I think I put in 15min instead on 12min.  Cachang will run a deposition tonight to check dep rate



From maurice at snf.stanford.edu  Tue Aug 30 15:43:56 2011
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Tue, 30 Aug 2011 15:43:56 -0700
Subject: Problem tylanpoly SNF 2011-08-30 15:43:56: High dep rate?
Message-ID: <mailman.1145.1356283799.5060.tylanpoly-pcs@snf.stanford.edu>

Ran Polyemit  00:12:00
expected ~1200ang
Actual  1575 and
I think I put in 15min instead on 12min.  Cachang will run a deposition tonight to check dep rate



From cachang at snf.stanford.edu  Tue Aug 30 23:25:20 2011
From: cachang at snf.stanford.edu (cachang at snf.stanford.edu)
Date: Tue, 30 Aug 2011 23:25:20 -0700
Subject: Comment tylanpoly SNF 2011-08-30 23:25:19: High dep rate
Message-ID: <mailman.1146.1356283799.5060.tylanpoly-pcs@snf.stanford.edu>

I ran polyemit for 40mins, and I got very similar dep rate as Maurice.
40mins for 5300A polysilicon.



From lindaw at snf.stanford.edu  Wed Aug 31 15:02:01 2011
From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu)
Date: Wed, 31 Aug 2011 15:02:01 -0700
Subject: Comment tylanpoly SNF 2011-08-31 15:02:01: dep rate ok for me
Message-ID: <mailman.1147.1356283799.5060.tylanpoly-pcs@snf.stanford.edu>

AMOR585 24 min target 1500A.  Got 1508 +-10A.