Shutdown tylanpoly SNF 2011-08-29 13:25:13: SiH4 Sensor is bad

seymour at snf.stanford.edu seymour at snf.stanford.edu
Tue Aug 30 08:09:50 PDT 2011


replaced silane sensor. checked all 4 gas flows. all flowed to setpoint. tube base pressure good. needs testing after repair




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