From lindaw at snf.stanford.edu Thu Dec 1 12:06:40 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 1 Dec 2011 12:06:40 -0800 Subject: Comment tylanpoly SNF 2011-12-01 12:06:39: The 1.4mm wide slot quartz boat is missing Message-ID: The 1.4mm wide slot quartz boat is missing from the tylan poly tube. It is identifiable by the "1.4" label on the boat end cross bar and the slanted slot geometry. Please return the boat to tylanpoly. Also, the prong used to remove or move boats for the tylan poly/nitride tubes is missing a quartz sheath on the right prong. From tberg at snf.stanford.edu Thu Dec 1 12:26:47 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 1 Dec 2011 12:26:47 -0800 Subject: Comment tylanpoly SNF 2011-01-04 12:15:08: found vented in polypump program Message-ID: noted From tberg at snf.stanford.edu Thu Dec 1 12:27:05 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 1 Dec 2011 12:27:05 -0800 Subject: Comment tylanpoly SNF 2011-02-22 15:20:23: after run finished, pressing the alarm ack Message-ID: noted From tberg at snf.stanford.edu Thu Dec 1 12:27:21 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 1 Dec 2011 12:27:21 -0800 Subject: Comment tylanpoly SNF 2011-03-22 12:13:42: Checked gas flows, put into pump program Message-ID: OK now From tberg at snf.stanford.edu Thu Dec 1 12:31:53 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 1 Dec 2011 12:31:53 -0800 Subject: Comment tylanpoly SNF 2011-04-15 09:30:09: oil and filter changed Message-ID: From tberg at snf.stanford.edu Thu Dec 1 12:32:06 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 1 Dec 2011 12:32:06 -0800 Subject: Comment tylanpoly SNF 2011-05-10 09:09:17: oil and filter changed Message-ID: noted From tberg at snf.stanford.edu Thu Dec 1 12:33:09 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 1 Dec 2011 12:33:09 -0800 Subject: Comment tylanpoly SNF 2011-05-11 07:32:55: found tylanpoly tube vented in ready mode Message-ID: noted From tberg at snf.stanford.edu Thu Dec 1 12:33:20 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 1 Dec 2011 12:33:20 -0800 Subject: Comment tylanpoly SNF 2011-05-11 12:18:30: Polypump ended itself. Also tylannitride vented Message-ID: noted From tberg at snf.stanford.edu Thu Dec 1 12:33:30 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 1 Dec 2011 12:33:30 -0800 Subject: Comment tylanpoly SNF 2011-05-16 00:01:24: pressure Message-ID: noted From tberg at snf.stanford.edu Thu Dec 1 12:33:46 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 1 Dec 2011 12:33:46 -0800 Subject: Comment tylanpoly SNF 2011-08-21 20:41:54: MFS alarm Message-ID: ok now From tberg at snf.stanford.edu Thu Dec 1 12:33:56 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 1 Dec 2011 12:33:56 -0800 Subject: Comment tylanpoly SNF 2011-09-30 09:58:11: oil change Message-ID: noted From tberg at snf.stanford.edu Thu Dec 1 12:34:12 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 1 Dec 2011 12:34:12 -0800 Subject: Comment tylanpoly SNF 2011-04-12 16:22:59: New 4" wide slot boat coated Message-ID: OK From tberg at snf.stanford.edu Thu Dec 1 12:34:39 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 1 Dec 2011 12:34:39 -0800 Subject: Comment tylanpoly SNF 2011-03-13 18:39:06: the boat unloaded about 4 inches short of normal Message-ID: OK Now From tberg at snf.stanford.edu Thu Dec 1 12:34:56 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 1 Dec 2011 12:34:56 -0800 Subject: Comment tylanpoly SNF 2011-01-03 16:38:41: qual test Message-ID: noted From lindaw at snf.stanford.edu Thu Dec 1 12:46:06 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 1 Dec 2011 12:46:06 -0800 Subject: Problem tylanpoly SNF 2011-12-01 12:46:05: process pressure too high Message-ID: Running amor585, step 65 MFS alarm. Tube is flowing N2 and H2 in pre deposition step. Process pressure is above 500, when it should be 400 mT. put program on "HOLD" with 44 seconds left in step 65. Silane is not flowing yet. CAN PROGRAM BE ABORTED????? Concerns about the H2 that is flowing. From tberg at snf.stanford.edu Thu Dec 1 13:47:49 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 1 Dec 2011 13:47:49 -0800 Subject: Problem tylanpoly SNF 2011-12-01 12:46:05: process pressure too high Message-ID: Checked flows ran run pressure stable at 400.5 mT From tberg at snf.stanford.edu Thu Dec 1 13:48:21 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 1 Dec 2011 13:48:21 -0800 Subject: Comment tylanpoly SNF 2011-12-01 12:06:39: The 1.4mm wide slot quartz boat is missing Message-ID: Replaced loader fork will order wide slot boat From seymour at snf.stanford.edu Mon Dec 5 11:15:39 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 5 Dec 2011 11:15:39 -0800 Subject: Comment tylanpoly SNF 2011-12-05 11:15:39: placed new wide slot boat on loader Message-ID: From tberg at snf.stanford.edu Mon Dec 12 07:26:25 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 12 Dec 2011 07:26:25 -0800 Subject: Shutdown tylanpoly SNF 2011-12-12 07:26:25: Renovation Message-ID: