Problem tylanpoly SNF 2011-12-01 12:46:05: process pressure too high

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Thu Dec 1 12:46:06 PST 2011


Running amor585, step 65 MFS alarm.  Tube is flowing N2 and H2 in pre deposition step.  Process pressure is above 500, when it should be 400 mT.  put program on "HOLD" with 44 seconds left in step 65.  Silane is not flowing yet.  CAN PROGRAM BE ABORTED?????  Concerns about the H2 that is flowing.




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