From lindaw at snf.stanford.edu Tue Feb 22 13:54:34 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 22 Feb 2011 13:54:34 -0800 Subject: Problem tylanpoly SNF 2011-02-22 13:54:33: tube 9 I/O error front panel display dead Message-ID: From lindaw at snf.stanford.edu Tue Feb 22 14:00:41 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 22 Feb 2011 14:00:41 -0800 Subject: Shutdown tylanpoly SNF 2011-02-22 14:00:41: tube 9 I/O error, front panel dead Message-ID: The chattering noise that Maurice was hearing may hve something to do with the loss of communication of tube 9 to the tycom, and the loack of power in the remote panel on the front of the tube. My wafers are inside, the system had reached step 60 of amor585 last time I checked. The furnace control section of the front panel indicates that only nitrogen is flowing. Bad relay somewhere? From maurice at snf.stanford.edu Tue Feb 22 14:18:59 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 22 Feb 2011 14:18:59 -0800 Subject: Shutdown tylanpoly SNF 2011-02-22 14:00:41: tube 9 I/O error, front panel dead Message-ID: Ted reset under loader...run continued From maurice at snf.stanford.edu Tue Feb 22 14:19:08 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 22 Feb 2011 14:19:08 -0800 Subject: Problem tylanpoly SNF 2011-02-22 13:54:33: tube 9 I/O error front panel display dead Message-ID: Ted reset under loader...run continued From lindaw at snf.stanford.edu Tue Feb 22 14:36:26 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 22 Feb 2011 14:36:26 -0800 Subject: Problem tylanpoly SNF 2011-02-22 14:36:26: center TC small "b" Message-ID: From lindaw at snf.stanford.edu Tue Feb 22 15:20:24 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 22 Feb 2011 15:20:24 -0800 Subject: Comment tylanpoly SNF 2011-02-22 15:20:23: after run finished, pressing the alarm ack Message-ID: after unloading my wafers after the tube came out, I pressed the alarm ack button, but nothing happened. Usually, pressing the alarm ack button when a run is complete causes a audible alarm, which is silenced when the button is hit again, and the boat goes back into the tube. This didn't work this time. I had to abort, and the audible alarm sounded, then hit alarm ack to get the boat to go back into the tube. May have has something to do with the power glitch in the front panel during the run. From npapte at snf.stanford.edu Wed Feb 23 21:19:28 2011 From: npapte at snf.stanford.edu (npapte at snf.stanford.edu) Date: Wed, 23 Feb 2011 21:19:28 -0800 Subject: Shutdown tylanpoly SNF 2011-02-23 21:19:27: recipe stuck at backfill step Message-ID: recipe stuck at backfill step. cannot communicate with tube from Tycom, cannot boat the tube out. From tberg at snf.stanford.edu Thu Feb 24 12:40:25 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 24 Feb 2011 12:40:25 -0800 Subject: Problem tylanpoly SNF 2011-02-22 14:36:26: center TC small "b" Message-ID: Cleaned TC com`ntacts no b now From tberg at snf.stanford.edu Thu Feb 24 12:41:04 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 24 Feb 2011 12:41:04 -0800 Subject: Shutdown tylanpoly SNF 2011-02-23 21:19:27: recipe stuck at backfill step Message-ID: manually opened tube loaded poly pump ran no problem