From lindaw at snf.stanford.edu Fri Mar 11 13:45:20 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 11 Mar 2011 13:45:20 -0800 Subject: Problem tylanpoly SNF 2011-03-11 13:45:19: Green status indicator on right front panel lights out Message-ID: The top right status inidicator on the front panel of the poly tube is dark. I tried tapping it, and it came back on for a second, then went dark again. Tube status can still be verified on the tycom display, so the furnace is fine, but the front panel lights are a tad flakey. From lindaw at snf.stanford.edu Sun Mar 13 18:39:07 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sun, 13 Mar 2011 18:39:07 -0700 Subject: Comment tylanpoly SNF 2011-03-13 18:39:06: the boat unloaded about 4 inches short of normal Message-ID: When my run completed, the boat came out, but was about 4 inches short from the end point. There was also a rythmic thumping noise (that turned out to be the drive cable for bpsg tube). I unloaded wafers, and the boat loaded normally. Ran polypump fine. But at step 25, it still sounds like the drive cable is still trying to load the boat. From tberg at snf.stanford.edu Mon Mar 14 14:11:33 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 14 Mar 2011 14:11:33 -0700 Subject: Problem tylanpoly SNF 2011-03-11 13:45:19: Green status indicator on right front panel lights out Message-ID: replaced neon it reads now From chongxie at snf.stanford.edu Tue Mar 22 01:42:15 2011 From: chongxie at snf.stanford.edu (chongxie at snf.stanford.edu) Date: Tue, 22 Mar 2011 01:42:15 -0700 Subject: Problem tylanpoly SNF 2011-03-22 01:42:14: no deposition Message-ID: From tberg at snf.stanford.edu Tue Mar 22 06:10:02 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 22 Mar 2011 06:10:02 -0700 Subject: Problem tylanpoly SNF 2011-03-22 01:42:14: no deposition Message-ID: Air operated valve to cylinder was not opened-opened From chongxie at snf.stanford.edu Tue Mar 22 11:08:41 2011 From: chongxie at snf.stanford.edu (chongxie at snf.stanford.edu) Date: Tue, 22 Mar 2011 11:08:41 -0700 Subject: Problem tylanpoly SNF 2011-03-22 11:08:41: no deposition Message-ID: mfs alarm went on many times. no depostion at all. From tberg at snf.stanford.edu Tue Mar 22 12:13:43 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 22 Mar 2011 12:13:43 -0700 Subject: Comment tylanpoly SNF 2011-03-22 12:13:42: Checked gas flows, put into pump program Message-ID: Checked gas flows, put into pump program will keep open for observation