Comment tylanpoly SNF 2011-03-13 18:39:06: the boat unloaded about 4 inches short of normal

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Sun Mar 13 18:39:07 PDT 2011


When my run completed, the boat came out, but was about 4 inches short from the end point.  There was also a rythmic thumping noise (that turned out to be the drive cable for bpsg tube).  I unloaded wafers, and the boat loaded normally. Ran polypump fine.  But at step 25, it still sounds like the drive cable is still trying to load the boat.




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