Problem tylanpoly SNF 2011-03-22 11:08:41: no deposition
chongxie at snf.stanford.edu
chongxie at snf.stanford.edu
Tue Mar 22 11:08:41 PDT 2011
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Problem tylanpoly SNF 2011-03-22 01:42:14: no deposition
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Comment tylanpoly SNF 2011-03-22 12:13:42: Checked gas flows, put into pump program
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mfs alarm went on many times. no depostion at all.
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Problem tylanpoly SNF 2011-03-22 01:42:14: no deposition
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Comment tylanpoly SNF 2011-03-22 12:13:42: Checked gas flows, put into pump program
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