From seymour at snf.stanford.edu Tue May 10 09:09:18 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 10 May 2011 09:09:18 -0700 Subject: Comment tylanpoly SNF 2011-05-10 09:09:17: oil and filter changed Message-ID: level glass clean From lindaw at snf.stanford.edu Wed May 11 07:32:55 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 11 May 2011 07:32:55 -0700 Subject: Comment tylanpoly SNF 2011-05-11 07:32:55: found tylanpoly tube vented in ready mode Message-ID: Found the tube in ready mode, program polypump. From lindaw at snf.stanford.edu Wed May 11 12:18:30 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 11 May 2011 12:18:30 -0700 Subject: Comment tylanpoly SNF 2011-05-11 12:18:30: Polypump ended itself. Also tylannitride vented Message-ID: tylanpoly was alarming signalling the end of polypump. I also noticed that tylannitride was vented in ready mode in program pump10. I restarted both pump programs as there are no reservations for either tube on coral. tylanbpsg is running step 25 in program pump11 just fine, no problems. Odd. From lindaw at snf.stanford.edu Wed May 11 12:35:40 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 11 May 2011 12:35:40 -0700 Subject: Problem tylanpoly SNF 2011-05-11 12:35:39: polypump ended by itself Message-ID: after about 7 minutes after restarting the polypump program, the program has gone to the end step and is alarming. I have restarted it again. From lindaw at snf.stanford.edu Wed May 11 12:47:04 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 11 May 2011 12:47:04 -0700 Subject: Problem tylanpoly SNF 2011-05-11 12:47:03: step 35 process pressure too high Message-ID: OK, it looks like the tube cannot maintain proper pressure during step 35 of polypump. process self aborted (this time about 4 minutes into step 35). Pressure went from a46 to 357, then back to 260 right before program aborted. I will leave it vented since it will just abort itself again. From seymour at snf.stanford.edu Thu May 12 08:43:42 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 12 May 2011 08:43:42 -0700 Subject: Problem tylanpoly SNF 2011-05-11 12:35:39: polypump ended by itself Message-ID: checked tube operation found N2 mfc required adjustment for zero. After adjusting i checked tube pressure running polypomp. With 100 sccm of N2 PPC wsas 122 mT. Base was 5 m? From seymour at snf.stanford.edu Thu May 12 08:44:55 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 12 May 2011 08:44:55 -0700 Subject: Problem tylanpoly SNF 2011-05-11 12:47:03: step 35 process pressure too high Message-ID: Tube has good pressure in step 25 (122 mT) step 35 is end of recipe. From jasmine at snf.stanford.edu Sun May 15 19:52:53 2011 From: jasmine at snf.stanford.edu (jasmine at snf.stanford.edu) Date: Sun, 15 May 2011 19:52:53 -0700 Subject: Comment tylanpoly SNF 2011-05-15 19:52:53: noticed rather high leak pressure Message-ID: I have noticed at leak checks, especially leak pressure (step 45/50) using POLyemit recipe, that the pressure is ~ 240, when it should be ~ 10-20. Is this ok? However my run completed and gave me the results needed. From kenney at snf.stanford.edu Mon May 16 00:01:25 2011 From: kenney at snf.stanford.edu (kenney at snf.stanford.edu) Date: Mon, 16 May 2011 00:01:25 -0700 Subject: Comment tylanpoly SNF 2011-05-16 00:01:24: pressure Message-ID: leak check pressure in step 40 had a terminal vvalue of 21 mT Looked good From maurice at snf.stanford.edu Mon May 16 10:31:11 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 16 May 2011 10:31:11 -0700 Subject: Comment tylanpoly SNF 2011-05-15 19:52:53: noticed rather high leak pressure Message-ID: from Kenny: leak check pressure in step 40 had a terminal vvalue of 21 mT Looked good