From wanglele501 at snf.stanford.edu Fri Nov 4 18:02:47 2011 From: wanglele501 at snf.stanford.edu (wanglele501 at snf.stanford.edu) Date: Fri, 4 Nov 2011 18:02:47 -0700 Subject: Problem tylanpoly SNF 2011-11-04 18:02:46: wafer broken Message-ID: Some wafer broken during 6 hours long deposition. Wafer holder leaves a small notch on the bottom side of the wafer. From seymour at snf.stanford.edu Fri Nov 11 08:02:36 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Nov 2011 08:02:36 -0800 Subject: Comment tylanpoly SNF 2011-11-11 08:02:35: oil and filter changed Message-ID: level glass clean From lindaw at snf.stanford.edu Fri Nov 11 15:02:14 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 11 Nov 2011 15:02:14 -0800 Subject: Problem tylanpoly SNF 2011-11-11 15:02:14: source baffle tipped over and lying flat on the rails Message-ID: I looks like the source baffle at the very back of the rails has tipped over on its side and is lying flat on the rails, but still centered. What the hey? From tberg at snf.stanford.edu Mon Nov 14 07:07:22 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 14 Nov 2011 07:07:22 -0800 Subject: Problem tylanpoly SNF 2011-11-11 15:02:14: source baffle tipped over and lying flat on the rails Message-ID: Replaced baffle on loader From tberg at snf.stanford.edu Mon Nov 14 07:08:36 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 14 Nov 2011 07:08:36 -0800 Subject: Shutdown tylanpoly SNF 2011-11-14 07:08:35: Checking injectors Message-ID: From tberg at snf.stanford.edu Mon Nov 14 07:09:09 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 14 Nov 2011 07:09:09 -0800 Subject: Shutdown tylanpoly SNF 2011-11-14 07:08:35: Checking injectors Message-ID: wrong tube From tberg at snf.stanford.edu Tue Nov 15 05:45:55 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 Nov 2011 05:45:55 -0800 Subject: Shutdown tylanpoly SNF 2011-11-15 05:45:54: scheduled pull and clean Message-ID: From seymour at snf.stanford.edu Wed Nov 16 08:18:36 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 16 Nov 2011 08:18:36 -0800 Subject: Shutdown tylanpoly SNF 2011-11-15 05:45:54: scheduled pull and clean Message-ID: pull and clean completed. Installed t/c and truned on eleement breaker.Loaded polycoat recipe. tube will need test after coat From seymour at snf.stanford.edu Wed Nov 16 08:19:03 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 16 Nov 2011 08:19:03 -0800 Subject: Problem tylanpoly SNF 2011-11-04 18:02:46: wafer broken Message-ID: ppull and clean completed From seymour at snf.stanford.edu Wed Nov 16 08:19:45 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 16 Nov 2011 08:19:45 -0800 Subject: Shutdown tylanpoly SNF 2011-11-16 08:19:45: needs test after coat recipe runs Message-ID: From maurice at snf.stanford.edu Wed Nov 16 14:49:50 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 16 Nov 2011 14:49:50 -0800 Subject: Shutdown tylanpoly SNF 2011-11-16 08:19:45: needs test after coat recipe runs Message-ID: still needs test yellow light if anyone needs it time reserved tomorrow for a test From maurice at snf.stanford.edu Wed Nov 16 14:50:32 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 16 Nov 2011 14:50:32 -0800 Subject: Problem tylanpoly SNF 2011-11-16 14:50:31: needs test after pull/clean Message-ID: still needs test yellow light if anyone needs it time reserved tomorrow for a test From maurice at snf.stanford.edu Thu Nov 17 10:53:07 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 17 Nov 2011 10:53:07 -0800 Subject: Problem tylanpoly SNF 2011-11-16 14:50:31: needs test after pull/clean Message-ID: ran polyemit 00:10:00 expected 1150Ang Actually 1142 ang close enough