Problem tylanpoly SNF 2011-11-04 18:02:46: wafer broken

wanglele501 at snf.stanford.edu wanglele501 at snf.stanford.edu
Fri Nov 4 18:02:47 PDT 2011


Some wafer broken during 6 hours long deposition.  Wafer holder leaves a small notch on the bottom side of the wafer.




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