From cachang at snf.stanford.edu Sat Oct 1 19:47:49 2011 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Sat, 1 Oct 2011 19:47:49 -0700 Subject: Problem tylanpoly SNF 2011-10-01 19:47:49: MFS alarm Message-ID: Heard MFS alarm. I noticed that polypump recipe was loaded, but was not run. I pushed "run recipe" button. Also it seems like SiH4 sensor has some problems. From seymour at snf.stanford.edu Mon Oct 3 09:35:45 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 3 Oct 2011 09:35:45 -0700 Subject: Problem tylanpoly SNF 2011-10-01 19:47:49: MFS alarm Message-ID: adjusted zero on silane MFC From lindaw at snf.stanford.edu Sat Oct 8 15:04:13 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 8 Oct 2011 15:04:13 -0700 Subject: Problem tylanpoly SNF 2011-10-08 15:04:12: small "b" source TC Message-ID: From lindaw at snf.stanford.edu Sat Oct 8 16:13:22 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 8 Oct 2011 16:13:22 -0700 Subject: Comment tylanpoly SNF 2011-10-08 16:13:22: now in polypump small "b" is gone from s TC Message-ID: looks like the small "b" has "healed" itself. From tberg at snf.stanford.edu Mon Oct 10 06:13:55 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 10 Oct 2011 06:13:55 -0700 Subject: Problem tylanpoly SNF 2011-10-08 15:04:12: small "b" source TC Message-ID: it is not there now. From tberg at snf.stanford.edu Mon Oct 10 06:14:03 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 10 Oct 2011 06:14:03 -0700 Subject: Comment tylanpoly SNF 2011-10-08 16:13:22: now in polypump small "b" is gone from s TC Message-ID: it is not there now. From seymour at snf.stanford.edu Mon Oct 10 09:58:23 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 10 Oct 2011 09:58:23 -0700 Subject: Shutdown tylanpoly SNF 2011-10-10 09:58:23: pressure control issues Message-ID: From seymour at snf.stanford.edu Mon Oct 10 13:03:03 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 10 Oct 2011 13:03:03 -0700 Subject: Shutdown tylanpoly SNF 2011-10-10 09:58:23: pressure control issues Message-ID: adjusted n2purge mfc zero, system controls pressure correctly. From lindaw at snf.stanford.edu Tue Oct 11 16:35:23 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 11 Oct 2011 16:35:23 -0700 Subject: Problem tylanpoly SNF 2011-10-11 16:35:22: dep rate low: target 1500A, Measured 1023A Message-ID: Film looks thin. Measured monitor wafer, 1023 +- 7A. Target 1500A AMOR585 24 min. From lennonl at snf.stanford.edu Tue Oct 11 23:38:23 2011 From: lennonl at snf.stanford.edu (lennonl at snf.stanford.edu) Date: Tue, 11 Oct 2011 23:38:23 -0700 Subject: Problem tylanpoly SNF 2011-10-11 23:38:23: MFS Alarm step 60 Message-ID: pressure too high From maurice at snf.stanford.edu Thu Oct 13 11:05:50 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 13 Oct 2011 11:05:50 -0700 Subject: Shutdown tylanpoly SNF 2011-10-13 11:05:49: Running amor585 test Message-ID: From seymour at snf.stanford.edu Fri Oct 14 11:31:07 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 14 Oct 2011 11:31:07 -0700 Subject: Problem tylanpoly SNF 2011-10-11 16:35:22: dep rate low: target 1500A, Measured 1023A Message-ID: From seymour at snf.stanford.edu Fri Oct 14 11:34:24 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 14 Oct 2011 11:34:24 -0700 Subject: Problem tylanpoly SNF 2011-10-11 23:38:23: MFS Alarm step 60 Message-ID: The MFS460 had process pressure control issues. I checked the backfill N2 MFC and the process deritives aand set them to values given by Henry. The process pressure now controlls at setpoint with N2 purge H2 and Silane are flowing to setpoints. Maurice is runniing a test. From maurice at snf.stanford.edu Fri Oct 14 18:12:31 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 14 Oct 2011 18:12:31 -0700 Subject: Shutdown tylanpoly SNF 2011-10-13 11:05:49: Running amor585 test Message-ID: Ray cleaned contection to N2 sensor...pressure now stable at 400mtorr Ran AMOR585 00:24:00 expected 1500ang actual 1475 good dep From tberg at snf.stanford.edu Mon Oct 17 10:07:11 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 17 Oct 2011 10:07:11 -0700 Subject: Comment tylanpoly SNF 2011-08-30 23:25:19: High dep rate Message-ID: noted From tberg at snf.stanford.edu Mon Oct 17 10:07:31 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 17 Oct 2011 10:07:31 -0700 Subject: Comment tylanpoly SNF 2011-08-31 15:02:01: dep rate ok for me Message-ID: noted From tberg at snf.stanford.edu Tue Oct 18 08:59:25 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 18 Oct 2011 08:59:25 -0700 Subject: Shutdown tylanpoly SNF 2011-10-18 08:59:24: Changing N2 sensor on monoblock Message-ID: From seymour at snf.stanford.edu Tue Oct 18 09:29:15 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 18 Oct 2011 09:29:15 -0700 Subject: Shutdown tylanpoly SNF 2011-10-18 08:59:24: Changing N2 sensor on monoblock Message-ID: sensor changed, zero adjusted, auto zero routine ran. running pump10 From lindaw at snf.stanford.edu Tue Oct 18 14:04:23 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 18 Oct 2011 14:04:23 -0700 Subject: Problem tylanpoly SNF 2011-10-18 14:04:22: MFS alarm while venting after loading AMOR585 Message-ID: a few minutes after loading the AMOR585 program, while the tube is still venting after ending polypump, the MFS alarm sounded. New N2 sensor calibration? From lindaw at snf.stanford.edu Tue Oct 18 15:14:44 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 18 Oct 2011 15:14:44 -0700 Subject: Comment tylanpoly SNF 2011-10-18 15:14:43: deposition pressure seems to be stable Message-ID: Running AMOR585, step 70, initial pressure fluctuations a bit higher than normal, (380 - 420) but now seems stable at around 395- 405mT. From lindaw at snf.stanford.edu Mon Oct 24 14:34:07 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 24 Oct 2011 14:34:07 -0700 Subject: Problem tylanpoly SNF 2011-10-24 14:34:07: MFS alarm step 70 of AMOR585 Message-ID: The MFS alarm went off about 10 minutes in on the deposition step of AMOR585. THe N2 light is blinking on the front panel, and the n2purge is reading 7.3 when it should be 0. N2 sensor drift again? Pressure seems to be stable at around 400 mT, and the SiH4 and H2 flows are normal for the deposition process. From lindaw at snf.stanford.edu Mon Oct 24 14:44:44 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 24 Oct 2011 14:44:44 -0700 Subject: Problem tylanpoly SNF 2011-10-24 14:44:43: MFS alarm again error code 08 Message-ID: N2 light blinking again, and n2 flow showing 4.8 sccm with 2 minutes left in step 70 of AMOR585. From tberg at snf.stanford.edu Tue Oct 25 06:27:48 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 25 Oct 2011 06:27:48 -0700 Subject: Shutdown tylanpoly SNF 2011-10-25 06:27:47: water work Message-ID: From seymour at snf.stanford.edu Tue Oct 25 07:13:02 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 25 Oct 2011 07:13:02 -0700 Subject: Problem tylanpoly SNF 2011-10-24 14:34:07: MFS alarm step 70 of AMOR585 Message-ID: n2 zero was not at zero, adjusted From seymour at snf.stanford.edu Tue Oct 25 07:14:27 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 25 Oct 2011 07:14:27 -0700 Subject: Problem tylanpoly SNF 2011-10-24 14:44:43: MFS alarm again error code 08 Message-ID: n2 zero drifted From seymour at snf.stanford.edu Tue Oct 25 09:07:58 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 25 Oct 2011 09:07:58 -0700 Subject: Shutdown tylanpoly SNF 2011-10-25 09:07:58: replacing zero pots for n2 and silane Message-ID: From seymour at snf.stanford.edu Tue Oct 25 10:58:41 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 25 Oct 2011 10:58:41 -0700 Subject: Shutdown tylanpoly SNF 2011-10-25 09:07:58: replacing zero pots for n2 and silane Message-ID: replaced op amps for silane and n2 purge. checked all zeros. started polypump From tberg at snf.stanford.edu Tue Oct 25 11:17:08 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 25 Oct 2011 11:17:08 -0700 Subject: Shutdown tylanpoly SNF 2011-10-25 06:27:47: water work Message-ID: water work done From bchui at snf.stanford.edu Wed Oct 26 18:58:34 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Wed, 26 Oct 2011 18:58:34 -0700 Subject: Shutdown tylanpoly SNF 2011-10-26 18:58:34: Errored out w/ MFC alarm Message-ID: Tried to run AMOR585, tube passed leak checked but gave MFC alarms at step 60. (The PRCPR seems normal most of the time but sometimes jumps to >1500). It then went on to step 65 for one second and jumped directly to step 80 etc. I tried the run again and exactly the same thing happened. From seymour at snf.stanford.edu Thu Oct 27 10:52:27 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 27 Oct 2011 10:52:27 -0700 Subject: Comment tylanpoly SNF 2011-10-18 15:14:43: deposition pressure seems to be stable Message-ID: the control valve for N2 backfill, the one used for pressure control was open all the time, causing the pressure to be maxed when pressure control to is enabled. I replaced the control valve and ran the tube in auto with the recipe loaded uesterday. It went through with no errors. From seymour at snf.stanford.edu Thu Oct 27 10:55:55 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 27 Oct 2011 10:55:55 -0700 Subject: Shutdown tylanpoly SNF 2011-10-26 18:58:34: Errored out w/ MFC alarm Message-ID: found control valve always full open. I replaced the valve and checked the operation. I ran the tube in auto with the recipe loaded yesterday and it went through with no alarms. From seymour at snf.stanford.edu Thu Oct 27 10:56:40 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 27 Oct 2011 10:56:40 -0700 Subject: Problem tylanpoly SNF 2011-10-18 14:04:22: MFS alarm while venting after loading AMOR585 Message-ID: tube is running ok at this time.