Problem tylanpoly SNF 2011-10-01 19:47:49: MFS alarm

cachang at snf.stanford.edu cachang at snf.stanford.edu
Sat Oct 1 19:47:49 PDT 2011


Heard MFS alarm. I noticed that polypump recipe was loaded, but was not run. I pushed "run recipe" button. Also it seems like SiH4 sensor has some problems.




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