Problem tylanpoly SNF 2011-10-11 16:35:22: dep rate low: target 1500A, Measured 1023A

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Tue Oct 11 16:35:23 PDT 2011


Film looks thin. Measured monitor wafer, 1023 +- 7A.  Target 1500A
 AMOR585 24 min. 




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