Problem tylanpoly SNF 2011-10-11 23:38:23: MFS Alarm step 60

seymour at snf.stanford.edu seymour at snf.stanford.edu
Fri Oct 14 11:34:24 PDT 2011


The MFS460 had process pressure control issues. I checked the 
backfill N2 MFC and the process deritives aand set them to values given by Henry. The process pressure now controlls at setpoint with N2 purge H2 and Silane are flowing to setpoints.
Maurice is runniing a test.




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