Problem tylanpoly SNF 2011-10-24 14:34:07: MFS alarm step 70 of AMOR585

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Mon Oct 24 14:34:07 PDT 2011


The MFS alarm went off about 10 minutes in on the deposition step of AMOR585.  THe N2 light is blinking on the front panel, and the n2purge is reading 7.3 when it should be 0.  N2 sensor drift again?  Pressure seems to be stable at around 400 mT, and the SiH4 and H2 flows are normal for the deposition process.




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