Comment tylanpoly SNF 2011-10-18 15:14:43: deposition pressure seems to be stable

seymour at snf.stanford.edu seymour at snf.stanford.edu
Thu Oct 27 10:52:27 PDT 2011


the control valve for N2 backfill, the one used for pressure control was open all the time, causing the pressure to be maxed when pressure control to is enabled. I replaced the control valve and ran the tube in auto with the recipe loaded uesterday. It went through with no errors.




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