From seymour at snf.stanford.edu Thu Sep 1 07:02:44 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 1 Sep 2011 07:02:44 -0700 Subject: Problem tylanpoly SNF 2011-08-30 15:43:56: High dep rate? Message-ID: user reported normal dep rate From latta at snf.stanford.edu Thu Sep 1 10:30:32 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 1 Sep 2011 10:30:32 -0700 Subject: Comment tylanpoly SNF 2011-09-01 10:30:31: SiH4 alram during polypump recipe Message-ID: From seymour at snf.stanford.edu Thu Sep 1 11:18:58 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 1 Sep 2011 11:18:58 -0700 Subject: Comment tylanpoly SNF 2011-09-01 10:30:31: SiH4 alram during polypump recipe Message-ID: adjusted MFC zero. Not alarming at this time. From lindaw at snf.stanford.edu Mon Sep 12 15:21:12 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 12 Sep 2011 15:21:12 -0700 Subject: Problem tylanpoly SNF 2011-09-12 15:21:12: MFS alarm step 65 amor585 Message-ID: MFS alarm at step 65. flow for SIH4 set for 0, but reading 27.6. Pressure should be around 400, but went up to 800 before going back down to betwen 600 and 700mt. Put process on hold at ~7 min left in step 65 From lindaw at snf.stanford.edu Mon Sep 12 15:26:43 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 12 Sep 2011 15:26:43 -0700 Subject: Problem tylanpoly SNF 2011-09-12 15:26:43: aborted and run polypump Message-ID: wafers are still in the tube. front panel SIH4 light blinking. SiH4 set for 0, but showing 25.9 sccm on tycom display From lindaw at snf.stanford.edu Mon Sep 12 15:32:03 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 12 Sep 2011 15:32:03 -0700 Subject: Problem tylanpoly SNF 2011-09-12 15:32:02: also, load tc showing small "b" Message-ID: From lindaw at snf.stanford.edu Mon Sep 12 15:50:19 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 12 Sep 2011 15:50:19 -0700 Subject: Shutdown tylanpoly SNF 2011-09-12 15:50:19: MFS alarm and tube not pumping down. Message-ID: See problem comments for details. From tberg at snf.stanford.edu Tue Sep 13 06:06:40 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 13 Sep 2011 06:06:40 -0700 Subject: Shutdown tylanpoly SNF 2011-09-13 06:06:39: Pull and clean Message-ID: From seymour at snf.stanford.edu Wed Sep 14 09:49:01 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 14 Sep 2011 09:49:01 -0700 Subject: Problem tylanpoly SNF 2011-09-12 15:21:12: MFS alarm step 65 amor585 Message-ID: no more alarms From seymour at snf.stanford.edu Wed Sep 14 09:49:20 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 14 Sep 2011 09:49:20 -0700 Subject: Problem tylanpoly SNF 2011-09-12 15:26:43: aborted and run polypump Message-ID: replaced silane sensor From seymour at snf.stanford.edu Wed Sep 14 09:49:43 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 14 Sep 2011 09:49:43 -0700 Subject: Problem tylanpoly SNF 2011-09-12 15:32:02: also, load tc showing small "b" Message-ID: no more small 'b" From seymour at snf.stanford.edu Wed Sep 14 09:50:09 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 14 Sep 2011 09:50:09 -0700 Subject: Shutdown tylanpoly SNF 2011-09-12 15:50:19: MFS alarm and tube not pumping down. Message-ID: pulled and cleaned tube From seymour at snf.stanford.edu Wed Sep 14 09:50:23 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 14 Sep 2011 09:50:23 -0700 Subject: Shutdown tylanpoly SNF 2011-09-13 06:06:39: Pull and clean Message-ID: clean completed From seymour at snf.stanford.edu Wed Sep 14 09:50:43 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 14 Sep 2011 09:50:43 -0700 Subject: Problem tylanpoly SNF 2011-09-14 09:50:43: tube coated needs test Message-ID: From maurice at snf.stanford.edu Wed Sep 14 14:17:48 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 14 Sep 2011 14:17:48 -0700 Subject: Shutdown tylanpoly SNF 2011-09-14 14:17:48: testing after tube pull Message-ID: From maurice at snf.stanford.edu Wed Sep 14 16:44:15 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 14 Sep 2011 16:44:15 -0700 Subject: Shutdown tylanpoly SNF 2011-09-14 14:17:48: testing after tube pull Message-ID: test complete Ran polyemit 00:12:00 expected~1500ang Actually 1774 rate a little higher than last run From maurice at snf.stanford.edu Wed Sep 14 16:44:34 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 14 Sep 2011 16:44:34 -0700 Subject: Problem tylanpoly SNF 2011-09-14 09:50:43: tube coated needs test Message-ID: test complete From tberg at snf.stanford.edu Mon Sep 19 06:26:48 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 19 Sep 2011 06:26:48 -0700 Subject: Problem tylanpoly SNF 2011-09-19 06:26:47: SiH4 leak on MFS Message-ID: From seymour at snf.stanford.edu Mon Sep 19 08:40:27 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 19 Sep 2011 08:40:27 -0700 Subject: Problem tylanpoly SNF 2011-09-19 06:26:47: SiH4 leak on MFS Message-ID: checked and adjusted zero pot on the monoblock for silane MFC. Silane no reading zero and happy. From seymour at snf.stanford.edu Fri Sep 30 09:58:12 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 30 Sep 2011 09:58:12 -0700 Subject: Comment tylanpoly SNF 2011-09-30 09:58:11: oil change Message-ID: