Problem tylanpoly SNF 2011-09-12 15:26:43: aborted and run polypump

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Mon Sep 12 15:26:43 PDT 2011


wafers are still in the tube.  front panel SIH4 light blinking.  SiH4 set for 0, but showing 25.9 sccm on tycom display




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