From wheeler at snf.stanford.edu Sun Dec 23 09:29:48 2012 From: wheeler at snf.stanford.edu (wheeler at snf.stanford.edu) Date: May 15, 2000 Subject: Shutdown tylanpoly: SiH4 gas cylinder change Message-ID: From wheeler at snf.stanford.edu Sun Dec 23 09:29:48 2012 From: wheeler at snf.stanford.edu (wheeler at snf.stanford.edu) Date: May 16, 2000 Subject: Shutdown Clear tylanpoly: Cylinder changed Message-ID: From gaul at snf.stanford.edu Sun Dec 23 09:29:48 2012 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: May 19, 2000 Subject: Shutdown tylanpoly: pressure in burn box Message-ID: From gaul at snf.stanford.edu Sun Dec 23 09:29:48 2012 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: May 19, 2000 Subject: Shutdown Clear tylanpoly: completed Message-ID: From mbadi at snf.stanford.edu Sun Dec 23 09:29:48 2012 From: mbadi at snf.stanford.edu (mbadi at snf.stanford.edu) Date: Jul 14, 2000 Subject: Problem tylanpoly: MFC Alarm went off Message-ID: The MFC alarm went off. I noticed it when I went to check the Process Pressure in Step 60. I looked through my notes but couldn't find any mention of it -- in the training binder, however, I read that the problem is related to gas flow and that the fix is to hit Alarm Ack. I did so and the alarm went stopped. When I checked my process pressure, however, it seemed normal. The training brochure said to write the alarm up as a problem. Hence this note. Thanks. Mohammed Badi mbadi at snf From gaul at snf.stanford.edu Sun Dec 23 09:29:48 2012 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Jul 18, 2000 Subject: Problem Clear tylanpoly: shutdown to fix problem Message-ID: From gaul at snf.stanford.edu Sun Dec 23 09:29:48 2012 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Jul 18, 2000 Subject: Shutdown tylanpoly: Shutdown to clean tube Message-ID: From gaul at snf.stanford.edu Sun Dec 23 09:29:48 2012 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Jul 24, 2000 Subject: Shutdown Clear tylanpoly: Tube has been cleaned and poly coated Message-ID: From anolley at snf.stanford.edu Sun Dec 23 09:29:48 2012 From: anolley at snf.stanford.edu (anolley at snf.stanford.edu) Date: Jul 26, 2000 Subject: Problem tylanpoly: No quartz dummies Message-ID: No quartz dummies available, using cleaned silicon wafers. From jgarate at snf.stanford.edu Sun Dec 23 09:29:48 2012 From: jgarate at snf.stanford.edu (jgarate at snf.stanford.edu) Date: Jul 27, 2000 Subject: Problem Clear tylanpoly: Quatrz dummies have been added to Poly tube Message-ID: From mtrivedi at snf.stanford.edu Sun Dec 23 09:29:48 2012 From: mtrivedi at snf.stanford.edu (mtrivedi at snf.stanford.edu) Date: Aug 6, 2000 Subject: Problem tylanpoly: Message-ID: From gaul at snf.stanford.edu Sun Dec 23 09:29:48 2012 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Aug 7, 2000 Subject: Problem Clear tylanpoly: Reset tylan 460 Message-ID: From anolley at snf.stanford.edu Sun Dec 23 09:29:48 2012 From: anolley at snf.stanford.edu (anolley at snf.stanford.edu) Date: Aug 16, 2000 Subject: Problem tylanpoly: polytube Message-ID: tube gets stuck coming out From gaul at snf.stanford.edu Sun Dec 23 09:29:48 2012 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Aug 21, 2000 Subject: Problem Clear tylanpoly: Fixed pully on motor Message-ID: From tberg at snf.stanford.edu Sun Dec 23 09:29:48 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:29:48 -0000 Subject: Problem tylanpoly SNF 2012-08-24 07:27:13: phosphine cylinder change Message-ID: <16632858.108.1345818433876.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 09:29:48 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:29:48 -0000 Subject: Problem tylanpoly SNF 2012-08-24 07:27:13: phosphine cylinder change Message-ID: <21553723.12.1349791134441.JavaMail.coral@shine> done