From seymour at snf.stanford.edu Mon Feb 6 09:15:59 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 6 Feb 2012 09:15:59 -0800 Subject: Comment tylanpoly SNF 2012-02-06 09:15:58: tube aralaming for silane leak Message-ID: rezeroed silane mfc and reset alarm From tberg at snf.stanford.edu Tue Feb 14 13:45:24 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 14 Feb 2012 13:45:24 -0800 Subject: Comment tylanpoly SNF 2011-12-05 11:15:39: placed new wide slot boat on loader Message-ID: Noted From tberg at snf.stanford.edu Tue Feb 14 13:45:45 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 14 Feb 2012 13:45:45 -0800 Subject: Shutdown tylanpoly SNF 2011-12-12 07:26:25: Renovation Message-ID: Gases back on needs test From tberg at snf.stanford.edu Tue Feb 14 13:46:03 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 14 Feb 2012 13:46:03 -0800 Subject: Problem tylanpoly SNF 2012-02-14 13:46:03: Needs test Message-ID: From seymour at snf.stanford.edu Thu Feb 16 09:06:16 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 16 Feb 2012 09:06:16 -0800 Subject: Shutdown tylanpoly SNF 2012-02-16 09:06:15: MFS460 not controlling gas valves Message-ID: From seymour at snf.stanford.edu Fri Feb 17 07:04:35 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 17 Feb 2012 07:04:35 -0800 Subject: Shutdown tylanpoly SNF 2012-02-16 09:06:15: MFS460 not controlling gas valves Message-ID: replaced faulty card in controller. needs test From maurice at snf.stanford.edu Fri Feb 17 11:21:20 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 17 Feb 2012 11:21:20 -0800 Subject: Comment tylanpoly SNF 2012-02-17 11:21:19: First test thin Message-ID: polyemit 00:10:00 expected 1150Ang wafer1 ctblr 1067,1088,1064,1071,1084 1059, 1066,1057,1062, 1064 From maurice at snf.stanford.edu Fri Feb 17 15:20:39 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 17 Feb 2012 15:20:39 -0800 Subject: Problem tylanpoly SNF 2012-02-14 13:46:03: Needs test Message-ID: tested From maurice at snf.stanford.edu Fri Feb 17 15:24:43 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 17 Feb 2012 15:24:43 -0800 Subject: Problem tylanpoly SNF 2012-02-17 15:24:42: 2nd test thinner than expected Message-ID: polyemit 00:10:00 expected 1150Ang Actual thickness ave 1070ang - If your run is critical you should run a test before committing your wafers From lindaw at snf.stanford.edu Mon Feb 20 13:20:48 2012 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 20 Feb 2012 13:20:48 -0800 Subject: Problem tylanpoly SNF 2012-02-20 13:20:48: small "b" source TC Message-ID: also found tube vented with the polyemit recipe loaded. loded polypump and started recipe. Will wait till tomorrow to run test. From lindaw at snf.stanford.edu Mon Feb 20 13:34:42 2012 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 20 Feb 2012 13:34:42 -0800 Subject: Problem tylanpoly SNF 2012-02-20 13:34:42: Polypump aborts MFS error 01 Message-ID: the poly tube did not run polypump to final pumpdown and hold. MFS error :01 When I pushed run to restart the polypump, got a message on the front panel that said MFS MANUAL but the program had restarted. However it doesn't appear that the tube is pumping down at all, and the process aborts when it goes to step 15 because the pressure is too high. I will shut it down. From lindaw at snf.stanford.edu Mon Feb 20 13:35:06 2012 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 20 Feb 2012 13:35:06 -0800 Subject: Shutdown tylanpoly SNF 2012-02-20 13:35:05: see previous problem comment Message-ID: tube won't pump down. From seymour at snf.stanford.edu Tue Feb 21 10:16:51 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 21 Feb 2012 10:16:51 -0800 Subject: Problem tylanpoly SNF 2012-02-20 13:34:42: Polypump aborts MFS error 01 Message-ID: MFS460 in manual From seymour at snf.stanford.edu Tue Feb 21 10:17:45 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 21 Feb 2012 10:17:45 -0800 Subject: Shutdown tylanpoly SNF 2012-02-20 13:35:05: see previous problem comment Message-ID: MFS460 in manual started polypump and it based okay From maurice at snf.stanford.edu Tue Feb 21 11:29:24 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 21 Feb 2012 11:29:24 -0800 Subject: Problem tylanpoly SNF 2012-02-20 13:20:48: small "b" source TC Message-ID: logged From lindaw at snf.stanford.edu Tue Feb 21 14:34:12 2012 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 21 Feb 2012 14:34:12 -0800 Subject: Comment tylanpoly SNF 2012-02-21 14:34:12: test of AMOR585 a little thin Message-ID: Ran 24min dep AMOR585 on test wafer placed on center boat near the source end. expected ~1500, got 1435 +- 13A measuring 5 points, (top center bottom left right). Will adjust time of dep accordingly. From lindaw at snf.stanford.edu Wed Feb 22 13:59:02 2012 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 22 Feb 2012 13:59:02 -0800 Subject: Problem tylanpoly SNF 2012-02-22 13:59:02: small "b" source TC Message-ID: From tberg at snf.stanford.edu Thu Feb 23 08:49:30 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 23 Feb 2012 08:49:30 -0800 Subject: Problem tylanpoly SNF 2012-02-22 13:59:02: small "b" source TC Message-ID: No Bs at this time From lindaw at snf.stanford.edu Tue Feb 28 13:58:49 2012 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 28 Feb 2012 13:58:49 -0800 Subject: Comment tylanpoly SNF 2012-02-28 13:58:49: found vented, polyemit loaded Message-ID: The last user did not load and run the polypump program. Apparently system has been vented since sunday. loaded and ran polypump.