From balaji at sunray.snffab.stanford.edu Thu Apr 5 17:42:25 2001 From: balaji at sunray.snffab.stanford.edu (Balaji Venkateshwaran) Date: Thu, 5 Apr 2001 17:42:25 -0700 (PDT) Subject: cancelled time Message-ID: <200104060042.RAA21213@sunray.snffab.stanford.edu> Tylanpoly is available from 8pm tonight until 8 am tomorrow morning. I cancelled my schedule. Balaji From wada at stanford.edu Fri Apr 6 12:55:48 2001 From: wada at stanford.edu (Hiroyuki Wada) Date: Fri, 06 Apr 2001 12:55:48 -0700 Subject: polishing poly silicon In-Reply-To: <200104060042.RAA21213@sunray.snffab.stanford.edu> References: <200104060042.RAA21213@sunray.snffab.stanford.edu> Message-ID: <20010406123004.0D07.WADA@stanford.edu> Hello, I want to polish the surface of poly silicon to bond to silicon wafer. If you have information of the company which can polish poly silicon, would you let me know? Thank you, Hiroyuki Wada ----------------------------------------------------------------- Visiting researcher, Prof. Solgaard group, Electrical Engineering Ginzton Laboratory 46, Stanford University, Stanford, CA 94305 Phone 650 723 0278, Fax 650 725 2533, E-mail:wada at stanford.edu From mbadi at piezo.Stanford.EDU Fri Apr 6 15:10:34 2001 From: mbadi at piezo.Stanford.EDU (Mohammed H. Badi) Date: Fri, 6 Apr 2001 15:10:34 -0700 (PDT) Subject: PolySilicon Depostion Information Message-ID: Hey all, I did a poly deposition recently and thought I'd share my depostion/uniformity info: 4. Poly-Silicon depostion: Furnace: TylanPoly #9 Program: PolyEmit (90 min + variable time) Variable Time: 00:45:27 Expected Rate: 110 A/min Expected Thickness: 5000 A Measured Rate: 120.34 A/min Measured Thickness: 5470 A Uniformity: Wafer Schematic ########### ## ## ## ## ## 1 2 3 # # # # 4 5 6 # ## # ## 7 8 9 # ## ## ## ## ########### (Flat) Loc1 Loc2 Loc3 Loc4 Loc5 Loc6 Loc7 Loc8 Loc9 ---- ---- ---- ---- ---- ---- ---- ---- ---- 5460 5464 5470 5473 5472 5476 5479 5461 5471 From seymour at snf.stanford.edu Fri Apr 20 07:55:51 2001 From: seymour at snf.stanford.edu (Ray Seymour) Date: Fri, 20 Apr 2001 07:55:51 -0700 Subject: Shutdown for clean Message-ID: <3AE04DF7.625CC407@snf.stanford.edu> The tube is at 42 microns and needs a clean