polishing poly silicon

Hiroyuki Wada wada at stanford.edu
Fri Apr 6 12:55:48 PDT 2001


I want to polish the surface of poly silicon to bond to silicon wafer.
If you have information of the company which can polish poly silicon,
would you let me know?

Thank you,
Hiroyuki Wada
Visiting researcher, Prof. Solgaard group, Electrical Engineering 
Ginzton Laboratory 46, Stanford University, Stanford, CA 94305
Phone 650 723 0278, Fax 650 725 2533, E-mail:wada at stanford.edu

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