PolySilicon Depostion Information

Mohammed H. Badi mbadi at piezo.Stanford.EDU
Fri Apr 6 15:10:34 PDT 2001


Hey all,
  I did a poly deposition recently and thought I'd share my
depostion/uniformity info:


4.	Poly-Silicon depostion:
	Furnace: TylanPoly #9
	Program: PolyEmit (90 min + variable time)
	Variable Time: 00:45:27
	Expected Rate: 110 A/min
	Expected Thickness: 5000 A
	Measured Rate: 120.34 A/min
	Measured Thickness: 5470 A


   Uniformity:

              Wafer Schematic


                ###########
              ##            ##
             ##              ##
            ##  1    2    3   #
            #                  #
            #   4    5    6    #
            ##                 #
            ##  7    8    9   #
             ##              ##
              ##            ##
                ###########
		  (Flat)

            Loc1 Loc2 Loc3 Loc4 Loc5 Loc6 Loc7 Loc8 Loc9
            ---- ---- ---- ---- ---- ---- ---- ---- ----
	    5460 5464 5470 5473 5472 5476 5479 5461 5471












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