Toxic gas tests complete

Dick Crane rcrane at snf.stanford.edu
Mon Aug 6 17:29:41 PDT 2001


The toxic gas alarm system tests are now complete. All tools using toxic
gases are back up with the following exceptions:
tylanpoly
tylanbpsg
tylanSiGe
tystar 1
EPI

Silane MFC calibrations are still being completed. Tools should be up
tomorrow.

Thanks,

Dick



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