From sanli at piezo.Stanford.EDU  Mon Jul  2 14:22:43 2001
From: sanli at piezo.Stanford.EDU (Sanli Ergun)
Date: Mon, 2 Jul 2001 14:22:43 -0700 (PDT)
Subject: reservation cancelled
Message-ID: <Pine.GSO.4.31.0107021421490.22756-100000@piezo.Stanford.EDU>


I cancelled my reservation due to tylannitride failure.

________________________________________________________
Arif Sanli Ergun
Engineering Research Associate
E. L. Ginzton Laboratory,
Room : 130,
Stanford University,
Stanford, CA, 94305-4085
Phone: (650) 723-8447
Fax  : (650) 725-7509
www  : http://piezo.stanford.edu/group/IRP/sanliIRP.html



From sanli at piezo.Stanford.EDU  Thu Jul  5 17:54:52 2001
From: sanli at piezo.Stanford.EDU (Sanli Ergun)
Date: Thu, 5 Jul 2001 17:54:52 -0700 (PDT)
Subject: reservation cancelled
Message-ID: <Pine.GSO.4.31.0107051754180.1200-100000@piezo.Stanford.EDU>


I cancelled my reservation for this evening.

Sanli



From blondecrowe at hotmail.com  Sat Jul  7 12:55:48 2001
From: blondecrowe at hotmail.com (BC Montgomery)
Date: Sat, 07 Jul 2001 19:55:48 -0000
Subject: Nitride reservation cancelled
Message-ID: <F227lmRBaYFkuutSgcO00007bc1@hotmail.com>

Sorry for the late notice but I have cancelled my reservation for Nitride 
furnace today...Suzanne Stephenson
_________________________________________________________________
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From rcrane at snf.stanford.edu  Mon Jul 30 16:29:40 2001
From: rcrane at snf.stanford.edu (Dick Crane)
Date: Mon, 30 Jul 2001 16:29:40 -0700
Subject: Toxic gas shutdown Aug. 6
Message-ID: <3B65EDE4.B1B1A8E@snf.stanford.edu>

On Monday, August 6, 2001, from 0800 to 1600, the toxic gas distribution
system will shut down to allow reprogramming and testing of the gas
detection system as part of the fire alarm upgrade.
 
The following tools will be affected:
 
STSdep, EPI, PECVD, Plasmaquest, LAMpoly, P5000etch, AMTetcher,
TylanSiGe, Tylanpoly, TylanBPSG, Tylannitride, and Tystar.

The system will be tested during the day with occasional audio and
strobe test alarms. Please disregard toxic (blue light) alarms from 0800
to 1600 on Monday, August 6.

Thanks,

Dick


From seymour at snf.stanford.edu  Tue Jul 31 09:15:59 2001
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Tue, 31 Jul 2001 09:15:59 -0700
Subject: Tube clean
Message-ID: <3B66D9BF.97847A2A@snf.stanford.edu>

The tube is at its thickness level that a clean is required. I will
shutdown the tube on Monday morning 8/6 at 6:00 am  to start the clean.
please plan accordingly.