From seymour at snf.stanford.edu  Mon Oct  8 15:19:18 2001
From: seymour at snf.stanford.edu (ray seymour)
Date: Mon, 08 Oct 2001 15:19:18 -0700
Subject: silane cylinder
Message-ID: <3BC22665.40703ED4@snf.stanford.edu>

The silane cylinder is near its end of life and need to be replaced. I
would like to do this on Wednesday 10/10 and have the cylinder on leak
check until Thursday 10/11. If you have any questions please contact me
at 4-7425.



From seymour at snf.stanford.edu  Wed Oct 10 08:05:14 2001
From: seymour at snf.stanford.edu (ray seymour)
Date: Wed, 10 Oct 2001 08:05:14 -0700
Subject: silane cylinder change
Message-ID: <3BC463A9.A849CC42@snf.stanford.edu>

the silane cylinder is being changed and the tools will be down until
tomorrow (10/11 for leak test.



From seymour at snf.stanford.edu  Thu Oct 11 07:29:11 2001
From: seymour at snf.stanford.edu (ray seymour)
Date: Thu, 11 Oct 2001 07:29:11 -0700
Subject: silane status
Message-ID: <3BC5ACB7.12E9A410@snf.stanford.edu>

The silane cylinder passed leak check and the tool is up to use.



From sanli at piezo.Stanford.EDU  Tue Oct 23 16:32:26 2001
From: sanli at piezo.Stanford.EDU (Sanli Ergun)
Date: Tue, 23 Oct 2001 16:32:26 -0700 (PDT)
Subject: poly-oxide
Message-ID: <Pine.GSO.4.33.0110231630150.27523-100000@piezo.Stanford.EDU>


Does anyone have data on the thermal oxide growth rate of amorphous
silicon (AMOR4006)?

Thanks

Sanli