Stress info?

Nancy Latta latta at
Mon Dec 9 11:25:12 PST 2002


Some of you may have recieved this request for nitride information,
too.  What we are looking for is stress information on the POLYEMIT and
any of the AMOR recipes.  Again, we'd like the approx date the data was
taken and the stress and thickness information.

We are creating an informational chart to put online for lab members to

Thanks in advance,

Nancy Latta
Stanford Nanofabrication Facility
CIS Room 145 
420 Via Palou Mall
Stanford, CA 94305-4070
(650) 725-6727
latta at

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