From balaji at sunray.snffab.stanford.edu  Thu May  2 18:16:46 2002
From: balaji at sunray.snffab.stanford.edu (Balaji Venkateshwaran)
Date: Thu, 2 May 2002 18:16:46 -0700 (PDT)
Subject: Bad poly run
Message-ID: <200205030116.SAA05515@sunray.snffab.stanford.edu>

Tylanpoly users,

I did a poly run on 04/09/02 (Tue) and used AMOR550.
I am trying to solve a problem related to etching this poly  - the problem is 
that I notice micromasking during the etch, due to the presence of some unknown 
impurity. 

One suspicion is that my poly dep may have been a bad one, but it is hard to 
confirm this. If any of you have noticed anything like this in the past with 
poly, please let me know - it'll help a lot towards understanding the problem.

Thanks,
Balaji




From tberg at snf.stanford.edu  Fri May 31 06:53:19 2002
From: tberg at snf.stanford.edu (Ted Berg)
Date: Fri, 31 May 2002 06:53:19 -0700
Subject: tube Clean
Message-ID: <3CF7804F.5CBED8C8@snf.stanford.edu>

as most of you know who regularly run the system, thickness is gfetting
up there. we are at 26.7 microns today so we will probably do the pull
and clean early next week.  please plan accordingly. thanks ted