Low SiH4 level alert

aliagah at stanford.edu aliagah at stanford.edu
Fri Oct 4 22:05:21 PDT 2002

I have used the tylan nitride for a total time of 110 min. So 1890 min
should be left.


Quoting Dick Crane <rcrane at snf.stanford.edu>:

> Silane/LP users,
> The silane cylinder that supplies tystar, poly, bpsg, and SiGe tubes
> will be changed on Monday, October 4. The quantity of gas remaining
> can
> support 2000 minutes of 200 sccm deposition plus a safety margin. As
> of
> now, there are no reservations for the weekend. If you do plan on
> running, please reply (reply to all) to this e-mail so any other
> user
> can compute remaining silane. Please do not run without noting gas
> usage. Example: 2000 min - dep time in minutes = remaining minutes
> for
> the next user. A spare cylinder with an automatic cylinder
> change-over
> manifold is in the works.
> Thanks and have a good weekend,
> Dick

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