Low SiH4 level alert

Chi On Chui chion at stanford.edu
Sat Oct 5 17:52:28 PDT 2002


Tylan10 (nitride) uses only DCS, not silane. I think I should start from
2000 mins.

I used 3 mins in tylan8 (sige). The remaining now should be 1997 mins.

/chi on

> I have used the tylan nitride for a total time of 110 min. So 1890 min
> should be left.
>
> Ali.
>

> > Example: 2000 min - dep time in minutes = remaining minutes
> >
> > Dick




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