From rcrane at snf.stanford.edu Mon Mar 10 16:01:37 2003 From: rcrane at snf.stanford.edu (Dick Crane) Date: Mon, 10 Mar 2003 16:01:37 -0800 Subject: Furnace shut down for Thermco tie-in Message-ID: <3E6D2761.C9709463@snf.stanford.edu> LP furnace users, Heads up for a future shut down. The good news: The long awaited process gas tie-in for the Thermco, bank 1 source cabinet is finally upon us. The bad news: The tie-in and permit required testing will necessitate a 10-14 day shut down of SiGe, Poly, Nitride, BPSG, and Tystar. We will attempt to reduce this time duration. The earliest start date for the tie-in would April 7, 2003. The permit issues are still being resolved, so the actual start time may be later. I will post a definite start date as soon as it is known. Please starting planning for this shut down. Furnaces NOT affected by this action: BBr3, POCl3, oxidation (tylan1-4,7), FGA, and TEOS. Thanks for your patience, Dick -------------- next part -------------- An HTML attachment was scrubbed... URL: From rcrane at snf.stanford.edu Thu Mar 13 12:13:00 2003 From: rcrane at snf.stanford.edu (Dick Crane) Date: Thu, 13 Mar 2003 12:13:00 -0800 Subject: silane cylinder change 3/19 Message-ID: <3E70E64C.44F78A70@snf.stanford.edu> LPCVD silane users, The silane supply cylinder is approaching its change-out limit. The change-out will occur at 0700 on 3/19 followed by the mandated, 24 hr. leak test. Good news, I am told the permit for the auto change-over plumbing has been issued. Once installed, cylinder change-outs will not interrupt normal furnace use. Thanks and sorry for any inconvenience, Dick From yapeter at stanford.edu Mon Mar 17 10:37:53 2003 From: yapeter at stanford.edu (Yves-Alain Peter) Date: Mon, 17 Mar 2003 10:37:53 -0800 Subject: available today Message-ID: <1047926273.3e7616013a871@webmail.stanford.edu> Sorry for the late notice (previous process step screwed up this morning) **************************************** Yves-Alain Peter Postdoctoral Researcher Stanford University Edward L. Ginzton Laboratory, 32 S 450 Via Palou street Stanford, CA 94305-4085 USA Phone : + 1 650 723 1945 Fax : + 1 801 912 5730 E-mail : yap at ieee.org http://www.stanford.edu/~yapeter **************************************** From rcrane at snf.stanford.edu Fri Mar 28 17:38:02 2003 From: rcrane at snf.stanford.edu (Dick Crane) Date: Fri, 28 Mar 2003 17:38:02 -0800 Subject: 4/21 Furnace shutdown for Thermco tie-in Message-ID: <3E84F8FA.4C28B49A@snf.stanford.edu> LP furnace users, The LPCVD furnace shutdown is now on schedule to start at 0600 on Monday, April 21, with a completion date of Wednesday, April 30. This action allows final connection of process gases to the Thermco, bank 1 furnace and will affect SiGe, Poly, Nitride, BPSG, and Tystar tubes. Please plan according. The permits are now in order, contractors have committed, staff is ready and county inspectors are being scheduled. The tie-in and permit required testing should take seven working days. There is a small amount of buffer time built in to this schedule. The issue of county inspections is still being resolved and has the highest change of delay. All work which could be addressed prior to shutdown has been completed. I will issue progress reports as milestones are completed. Furnaces NOT affected by this action: BBr3, POCl3, oxidation (tylan1-4,7), FGA, and TEOS. Thanks for your patience and understanding. This work represents a major step toward six inch processing capability. Dick -------------- next part -------------- An HTML attachment was scrubbed... URL: