TYLANPoly: grain size?

Dan Grupp grupp at stanford.edu
Wed Dec 8 18:26:02 PST 2004


Hi,
    DOes anyone know the grain size of the various poly processes? I was
going to run POLYEMIT, 5000A.
Thanks,
Dan

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Dr. Daniel Grupp, Visiting Scholar
Center for Integrated Systems
Stanford University
Stanford, CA 94305
(650) 724-6911
FAX:  723-4659
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