Thin Si deposition

Morgan Douglas Mager mmager at
Tue Jun 15 16:42:27 PDT 2004

    I was wondering if anyone has ever tried to deposit very thin layers 
of poly or amorphous silicon. I'm interested in making films of both 
types, ideally as thin as 20nm. If anyone has experience with this, please 
let me know what programs/parameters seem to work best. How were the 
    Also, in general, how good is the residual stress control in poly or 
amorphous films? Thanks for any help you can offer.


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