From iwjung at stanford.edu Fri Apr 22 12:03:17 2005 From: iwjung at stanford.edu (Il Woong Jung) Date: Fri, 22 Apr 2005 12:03:17 -0700 Subject: can someone help? Message-ID: <200504221903.j3MJ3ItV032305@smtp3.Stanford.EDU> Hi, Is anyone willing to let us piggyback one bare silicon wafer on their run in the tylanpoly? The run should be less than 0.5 um thick. Preferably close to 0.2um or even less. We just want to see the quality of poly at submicron thickness for mechanical structures. Stress, rounghness etc. If anyone has info already that would be even better. Thanks. Il Woong Jung ------------------------ EL Ginzton Labs 450 Via Palou 41C Stanford, CA 94305 office) 650-723-1992 lab) 650-723-6104 -------------- next part -------------- An HTML attachment was scrubbed... URL: