can someone help?
Il Woong Jung
iwjung at stanford.edu
Fri Apr 22 12:03:17 PDT 2005
Hi,
Is anyone willing to let us piggyback one bare silicon wafer on their run in
the tylanpoly?
The run should be less than 0.5 um thick. Preferably close to 0.2um or even
less.
We just want to see the quality of poly at submicron thickness for
mechanical structures. Stress, rounghness etc.
If anyone has info already that would be even better.
Thanks.
Il Woong Jung
------------------------
EL Ginzton Labs
450 Via Palou 41C
Stanford, CA 94305
office) 650-723-1992
lab) 650-723-6104
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