can someone help?

Il Woong Jung iwjung at stanford.edu
Fri Apr 22 12:03:17 PDT 2005


Hi,

 

Is anyone willing to let us piggyback one bare silicon wafer on their run in
the tylanpoly?

The run should be less than 0.5 um thick. Preferably close to 0.2um or even
less. 

We just want to see the quality of poly at submicron thickness for
mechanical structures. Stress, rounghness etc.

If anyone has info already that would be even better.

Thanks. 

 

 

Il Woong Jung

------------------------

EL Ginzton Labs

450 Via Palou 41C

Stanford, CA 94305

office) 650-723-1992

lab) 650-723-6104

 

 

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