Poly Dep rate low

Maurice Stevens maurice at stanford.edu
Tue Dec 6 13:48:01 PST 2005

The tylan poly deposition rate is currently 25% less than it was last 
week.  It may get closer to normal as the tube is getting coated.

We suggest you do a test run before a critical deposition.

If you have any questions,  send me an email.


maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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