green lighted

Maurice Stevens maurice at
Thu Apr 20 18:05:43 PDT 2006

pulled cleaned coated and tested
deprate 114a/min
across wafer uniformity 1.4%
system up

maurice at

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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