From maurice at stanford.edu  Tue Jun  6 18:07:32 2006
From: maurice at stanford.edu (Maurice Stevens)
Date: Tue, 06 Jun 2006 18:07:32 -0700
Subject: burnbox overpressure/tylan LPCVD's down
Message-ID: <448626D4.20009@stanford.edu>

The burnnbox was showing +5 on the pressure guage. The burnbox has been 
red lighted (which orange lighted all the tylan LPCVDs).

-m


-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From maurice at snf.stanford.edu  Wed Jun  7 09:45:02 2006
From: maurice at snf.stanford.edu (Maurice Stevens)
Date: Wed, 07 Jun 2006 09:45:02 -0700
Subject: burnbox cleaned/tylan LPCVD'sup
In-Reply-To: <448626D4.20009@stanford.edu>
References: <448626D4.20009@stanford.edu>
Message-ID: <4487028E.5080509@snf.stanford.edu>

Burnbox cleaned...tylanLPCVDs are up.

Maurice Stevens wrote:

> The burnnbox was showing +5 on the pressure guage. The burnbox has 
> been red lighted (which orange lighted all the tylan LPCVDs).
>
> -m
>
>

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278