burnbox overpressure/tylan LPCVD's down

Maurice Stevens maurice at stanford.edu
Tue Jun 6 18:07:32 PDT 2006


The burnnbox was showing +5 on the pressure guage. The burnbox has been 
red lighted (which orange lighted all the tylan LPCVDs).

-m


-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




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