burnbox overpressure/tylan LPCVD's down

Maurice Stevens maurice at stanford.edu
Tue Jun 6 18:07:32 PDT 2006

The burnnbox was showing +5 on the pressure guage. The burnbox has been 
red lighted (which orange lighted all the tylan LPCVDs).


maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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