burnbox cleaned/tylan LPCVD'sup

[Maurice Stevens]

Burnbox cleaned...tylanLPCVDs are up.

Maurice Stevens wrote:

> The burnnbox was showing +5 on the pressure guage. The burnbox has 
> been red lighted (which orange lighted all the tylan LPCVDs).
>
> -m
>
>

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278