From spotworthy at comcast.net Tue Jan 2 14:04:20 2007 From: spotworthy at comcast.net (spotworthy at comcast.net) Date: Tue, 02 Jan 2007 22:04:20 +0000 Subject: Test run OK 1/2/07 Message-ID: <010220072204.9528.459AD6E40000686000002538221652580697089B9D01999B019F9C@comcast.net> Ran a test run of process AMOR585 (24 min dep) on one test wafer, load side of the center boat, and the poly film was measured in 5 spots on the test wafer. Avg 1605A +- 45A top 1579A center 1634A bottom 1531A left 1658A right 1623A