Test run OK 1/2/07

spotworthy at comcast.net spotworthy at comcast.net
Tue Jan 2 14:04:20 PST 2007


Ran a test run of process AMOR585 (24 min dep) on one test wafer, load side of the center boat, and the poly film was measured in 5 spots on the test wafer.  Avg 1605A +- 45A

top  1579A
center  1634A
bottom  1531A
left   1658A
right 1623A



More information about the tylanpoly mailing list